1 / 5
| Model | CY-P10L-A |
| Working current | Total working current ≤ 2A (Excluding vacuum pump) |
| Chamber Material | High purity quartz tube |
| RF Frequency | 40KHZ |
| RF Power | 200-400W (10-100% adjustable) |
| Vacuum Degree | 60Pa-100Pa |
| Cleaning Time | 1-6000s adjustable |
| Gas Flow | >10-100ml |
| Process Control | Manual / Automatic |
| Vacuum Pump | Bipolar direct rotary vane pump |
| Impedance Matching | Automatic |
| Display | LCD |
| Power Supply | AC 220V 60Hz |





